An Investigation and Analysis on Forming Feature of the Micro-ball Lens Array by Novel Batch-fabrication Technique

in National workshop (full text oral presentation), 國內研討會(全文口頭發表)
標題An Investigation and Analysis on Forming Feature of the Micro-ball Lens Array by Novel Batch-fabrication Technique
出版類型國內研討會(全文口頭發表)
出版年度2004
AuthorsChi-Chang Hsieh, 謝其昌, Ru-Yuan Yang 潘正堂, Chi-Hui Chien 錢志回, Yung-Chang Chen 陳永昌, & 楊聰明
出版日期Nov 1 2004 12:0
其他編號0000
中文摘要

An innovative concept of batch-fabrication micro-ball lens array has been successfully demonstrated on the silicon wafer and presented in this paper. The novel method of batch-fabrication micro-ball lens not only replaces traditional way such as aspheric lens or expensive GRIN, which without sacrificing performance for process and occupying most of the process time but also reduces the cost of miniature assembly. The effective process is based on the thermal reflow of two polymeric layers to batch-fabricate micro-ball lens array onto a planar wafer to accomplish quick and neat batch-fabrication of micro-ball lens array. Two polymeric layers were coated orderly onto a silicon substrate. Once the patterned photoresist is heated up to its glass transition temperature (Tg), the surface tension will causes the interactive force between two material interfaces to transform the shape of melting photoresist into a spherical profile to minimize its surface energy. It exhibits a proportional relation between the micro-ball radius and micro-ball neck size, but if the micro-ball radius and the micro-ball neck size do not balance, it will incur the micro-ball peel off from the lower layer. When the reflow temperature changed and the rotation rate was constrained at a constant speed, the result exhibited an inverse proportion relation was existed between reflow temperature and neck-size of micro-ball. The effects of the process parameters such as thickness of PI and photoresist, reflow time and temperature are also investigated and discussed in this paper.

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