Fabrication of a Metal Protector for a Fiber Sensor using Through-Mask Electrochemical Micromachining with Pulse DC Power | Faculty Open Information System

Fabrication of a Metal Protector for a Fiber Sensor using Through-Mask Electrochemical Micromachining with Pulse DC Power

in Sciences Citation Index(SCI), 科學引文索引資料庫(SCI)
標題Fabrication of a Metal Protector for a Fiber Sensor using Through-Mask Electrochemical Micromachining with Pulse DC Power
出版類型SCI(Sciences Citation Index)
出版年度2011
AuthorsWei Te Wu(Benny), 吳瑋特, Wei Hung Shih 施威宏, & Chih-To Wang 王之鐸
開始頁707
頁數7
出版日期2011 / 4
其他編號0000
中文摘要

The purpose of this study is to fabricate a stainless steel protector for a weak fiber sensor after first stripping the polymer outer-layer off the fiber. In addition to protecting the fiber sensor, the stainless steel protector is required to connect the detection target and the sensor which requires drilling holes in the protector. We accomplished this by electrochemical micromachining the stainless steel protector using pulse DC, using 1 kV/m, 6.62% weight concentration of NaCl electrolyte solution, 500 rpm anode rotating rate, a 5 MHz pulse frequency, a 50% duty factor, and 6 min of machining time with a ring cathode gave the best results, producing an average hole-radius of 231.36 lm.

期刊名稱Microsystem Technologies
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