Fabrication and characterization of MEMS-based flow sensors based on hot films

in Sciences Citation Index(SCI), 科學引文索引資料庫(SCI)
標題Fabrication and characterization of MEMS-based flow sensors based on hot films
出版類型SCI(Sciences Citation Index)
AuthorsRong-Hua Ma, 馬榮華, Yu-Hsiang Wang 王禹翔, Sheng-Lin Chiang 江昇霖, & Chia-Yen Lee 李佳言
出版日期2011 / 4

The purpose of this paper is to propose two types
of airflow velocity measurement modules, double-chip and
single-chip, of MEMS-based flow sensors that consisting of
heating resistors and sensing resistors on alumina substrates.
In this study, MEMS techniques are used to deposit platinum
films on the substrate to form resistors which are to
regard as heaters and sensing elements. As air flows through
the heater and the sensor, the temperature of the sensing
resistor on the hot film decreases and the changes of the local
temperature determine the airflow rate. The experimental
results show the resistance linearly varies as airflow velocity
changes from 5 to 28 ms-1. Finally the experimental data
indicate that sensing performance of the single-chip type is
better than that of the double-chip type with its higher
sensitivity (0.7479 X/ms-1) due to the more rapid heat
conduction from the heating resistor to the sensing resistor.

期刊名稱Journal of Microsystem Technologies
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