Low-temperature deposited ZnO thin films on the flexible substrate by cathodic vacuum arc technology

in Sciences Citation Index(SCI), 科學引文索引資料庫(SCI)
標題Low-temperature deposited ZnO thin films on the flexible substrate by cathodic vacuum arc technology
出版類型SCI(Sciences Citation Index)
出版年度2011
AuthorsRu-Yuan Yang, 楊茹媛, & CHIN-MIN HSIUNG 熊京民
開始頁7119
頁數3
出版日期2011 / 3
其他編號0000
中文摘要

In this paper, un-doped zinc oxide (ZnO) films with various thicknesses (150, 250, 350, 450 and 550 nm)
were successfully prepared onto PET substrates using cathodic vacuum arc technique at low-temperature
(<40 ?C). Their microstructure, optical and electrical properties were investigated and discussed. The films
showed (0 0 2) peaks, an average transmittance over 80% in the visible region. Calculated values of the
band gap are around 3.29–3.33 eV when the film thickness increased, indicating a slight blue shift of
optical transmission spectra. The lowest resistivity about 5.26×10?3 cm could be achieved for the
un-doped ZnO film with thickness of 550 nm.

期刊名稱Applied Surface Science
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