High-performance MEMS-based gas chromatography column with integrated micro heater

in Sciences Citation Index(SCI), 科學引文索引資料庫(SCI)
標題High-performance MEMS-based gas chromatography column with integrated micro heater
出版類型SCI(Sciences Citation Index)
出版年度2011
AuthorsChia-Yen Lee, 李佳言, Chan-Chiung Liu 劉展冏, Shih-Chuan Chen 陳仕荃, Che-Ming Chiang 江哲銘, & Wen-Cheng Kuo 郭文正
開始頁523
頁數8
出版日期2011 / 4
其他編號98-2221-E-020-030-
中文摘要

A high-performance MEMS-based gas chromatography
(GC) device is proposed comprising a miniature
serpentine column with dimensions of 3.2 m 9
200 lm 9 250 lm (length 9 width 9 depth) and with an
integrated Pt micro heater. The column is fabricated on a Si
die measuring 3.5 9 1.8 mm2 using a wet etching process
and is bonded to a Pyrex cover plate incorporating the Pt
micro heater via a thermal fusion process. The experimental
results reveal that an applied voltage of 9.7 V is
sufficient to maintain a constant temperature of 85C for
elution purposes. In addition, it is shown that the proposed
device successfully detects the concentrations of both pure
and mixed samples of four volatile organic compound
gases, namely acetone, toluene, methanol, and benzene.
Finally, the theoretical plate number obtained by the proposed
MEMS-based GC device is shown to be 2–3 times
higher than that obtained from a conventional capillarybased
GC system under the same injection conditions.

期刊名稱Journal of Microsystem Technologies
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