Characteristics of ZnO/Al/ZnO multilayers on glass with different ZnO film thicknesses prepared by cathodic vacuum arc deposition

in International Symposium (oral presentation paper), 國際研討會(全文口頭發表)
標題Characteristics of ZnO/Al/ZnO multilayers on glass with different ZnO film thicknesses prepared by cathodic vacuum arc deposition
出版類型國際研討會(全文口頭發表)
出版年度2012
AuthorsChien-Wei Huang, 黃健瑋, Ru-Yuan Yang 潘正堂, & Ru-Yuan Yang 楊茹媛
出版日期Jul 4 2012 12:0
會議地點京都
其他編號0000
中文摘要

In this paper, the characteristics of the transparent ZnO/Al(10 nm)/ZnO multilayered films on glasssubstrate with different ZnO film thickness (50、100、150 and 200 nm) were investigated. The ZnO films were deposited using cathodic arc plasma technique at a low temperature (<75℃).
Microstructure,optical and electrical properties were investigated and discussed. The multilayered films showed a highorientation of (002) peak. An average transmittance around 70 % in the visible region and the lowestresistivity around 4.02×10-4 Ω-cm could be achieved for the ZnO(50 nm)/Al(10nm)/ZnO (50 nm)multilayered film.

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