Influence of annealing atmosphere on the characteristics of sol-gel derived ITO thin films

in International Symposium (oral presentation paper), 國際研討會(全文口頭發表)
標題Influence of annealing atmosphere on the characteristics of sol-gel derived ITO thin films
出版類型國際研討會(全文口頭發表)
出版年度2013
AuthorsYu-Ming Peng, 彭昱銘, Yan-Kuin Su 蘇炎坤, & Ru-Yuan Yang 楊茹媛
出版日期Apr 20 2013 12:0
會議地點香港
其他編號0000
中文摘要

In this paper, the Indium Tin Oxide (ITO) thin films were prepared by a sol-gel dip coating method and then annealed at 600℃ under different atmosphere (vacuum, N2 and 96.25%N2+3.75%H2). Their microstructure, optical and electrical properties were investigated and discussed. Suitable atmosphere can improve the crystalline of the ITO films, therefore the optical and electrical properties of the ITO films are improved. The uv-vis results showed the maximum of transmittance in the visible range (380-780 nm) of 85.6% and the lowest resistivity of 4.4×10-2 Ω-cm when the ITO films were annealed under 96.25% N2 with 3.75% H2 atmosphere.

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