Effect of the bias voltage on the structural,mechanical,electrical, and optical properties of the low temperature ZnO thin films deposited by using cathodic vacuum arc deposition system on plastic substrates

in International Symposium (oral presentation paper), 國際研討會(全文口頭發表)
標題Effect of the bias voltage on the structural,mechanical,electrical, and optical properties of the low temperature ZnO thin films deposited by using cathodic vacuum arc deposition system on plastic substrates
出版類型國際研討會(全文口頭發表)
出版年度2012
AuthorsRu-Yuan Yang, 楊茹媛, Ru-Yuan Yang 潘正堂, & Chien-Wei Huang 黃健瑋
會議地點臥龍崗
其他編號0000
中文摘要

The un-doped zinc oxide (ZnO) films on the polyethylene terephthalate (PET)
substrate at a low temperature (<75℃) by using cathode vacuum arc deposition
(CVAD) system with different negative substrate bias voltage applied between 0 and -
100 V. The material, mechanical, optical and electrical properties were investigated
and discussed. The results show that all ZnO thin films have (002) preferred orientation,
an average transmittance was over than 70 % in the visible region. Calculated
band gap values are all around 3.2 eV with the different substrate bias voltages. The
ZnO thin films with resistivities as low as 10-3 Ω*cm have been obtained by adjusting
the substrate bias voltage on the plastic substrates.

校址:912 屏東縣內埔鄉學府路1號 總機:886-8-7703202 傳真:886-8-7740165 系統開發統維護單位:國立屏東科技大學 電算中心 版權所有